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Nanometrics to supply Ebara with CMP metrology

Posted: 19 Jan 2004 ?? ?Print Version ?Bookmark and Share

Keywords:nanometrics? ebara? integrated metrology?

Nanometrics Inc. and Ebara Corp. have concluded a purchase agreement whereby Nanometrics will supply Ebara with integrated metrology (IM) units for integration into Ebara's CMP products. Ebara will integrate the Nanometrics IM products into their CMP products as one of the standard options on the CMP systems.

Moreover, Nanometrics will work closely with Ebara's field support organization to offer front line customer support for all such products supplied by Ebara to its global customers.

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