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Dow Corning enters lithographic solutions business

Posted: 21 Jan 2004 ?? ?Print Version ?Bookmark and Share

Keywords:dow corning electronics? lithographic materials? photoresists?

Dow Corning Electronics has announced its entry into the lithographic materials market.

The company says their decision to expand into the lithographic materials market was aided by the fact that the materials are key enablers in the IC manufacturing.

Dow Corning's fist products in lithographic solutions platform are silicon-based resins designed for use in developing advanced, 193nm bilayer photoresists and anti-reflective coatings. According to the company, it is working with companies in the microlithography industry to develop these resins. New products are currently being beta tested at several of their partner companies.

Anil Saxena, market manager for lithography solutions, stated, "The ITRS roadmap calls for new materials to enhance 193nm lithography. Silicon-based materials will play an important role in producing reliable, production-worthy bilayer photoresists and anti-reflective coatings. Dow Corning Electronics is committed to working with strategic technology partners to develop new resists that will minimize recurrent problems such as line-edge roughness, narrow line widths and pattern collapse," added Saxena.

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