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Cymer light source operates at 4kHz PRR

Posted: 02 Mar 2004 ?? ?Print Version ?Bookmark and Share

Keywords:els-7010? light source? cymer?

Cymer Inc. has launched its ELS-7010 krypton fluoride (KrF) excimer light source that is designed for volume-production lithography applications at the 248nm.

The ELS-7010 operates at a 4kHz pulse repetition rate (PRR), enabling it to support the highest scan speeds for maximum productivity and wafer throughput. Improved thermal extraction efficiency and optimized gas flow in the discharge chamber allow the device to deliver 40W output power. It delivers a high level of spectral performance through a highly line-narrowed bandwidth of <0.35pm at full-width half maximum (FWHM) and <1.2pm at 95 percent energy integral.

The light source features Variable Energy and Repetition Rate Operation (VERRO) to increase process latitude, MicroInject to minimize operational downtime, and high-accuracy tuning technology for wavelength stability.

The ELS-7010 is compatible with the company's e-Diagnostics and performance monitoring product (OnLine), enabling remote troubleshooting and predictive maintenance.

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