Newport semiconductor EFEM features wafer handling robot

Newport Corp. has disclosed that its Performix semiconductor fabrication equipment front-end module (EFEM) is the industry's first EFEM featuring an Automated Self Teach wafer handling robot.

The patented Automated Self Teach technology enables the Performix to be installed and operated without extensive operator training, and minimizes initial system setup time in both the equipment manufacturing environment and in the wafer fab during system start-up.

According to the company, the combination of the Automated Self Teach robot, together with the technology of Newport's ADO load port and prealigner, enables Performix to deliver exceptional throughput, superior ease of use and extended uptime.

Software provides operation, calibration

To use the Automated Self Teach capabilities, an operator selects pre-programmed, approximate locations for the load port, prealigner and tool. The optical through-beam wafer locating system then automatically registers these locations and calibrates the robot with high accuracy through a short motion operation. Ease of use is further enhanced by system software, which provides access to operation, calibration and diagnostic functions through a readily understood Graphical User Interface.

The Performix EFEM forms an isolated mini-environment between the process or metrology tool and FOUP or SMIF wafer carrier. The use of a highly repeatable precision datum-mounting scheme for all major EFEM components facilitates alignment during installation as well as removal and reassembly for servicing. This datum plane based scheme even allows the original design to be copied and installed without any field adjustment.

The device is available in two-, three-, or four-port configurations.