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MKS, Umetrics to provide process control solution

Posted: 13 Aug 2004 ?? ?Print Version ?Bookmark and Share

Keywords:umetrics? semiconductor? advanced process control? e-diagnostics? toolweb?

MKS Instruments Inc. and Umetrics AB have collaborated to offer semiconductor manufacturers a turn-key solution for advanced process control (APC) and e-diagnostics. The alliance combines MKS' expertise in semiconductor control technologies with Umetrics' proven analysis capabilities and results in a highly reliable fault detection and classification (FDC) application which is part of MKS' recently introduced TOOLweb product suite.

With this packaging of TOOLweb's open architecture connectivity, advanced sensor technologies and FDC software, MKS provides semiconductor manufacturers with the industry's most advanced solution for in-depth process monitoring and real-time advanced process control.

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