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Axcelis to offer AMD with single-wafer technology

Posted: 03 Dec 2004 ?? ?Print Version ?Bookmark and Share

Keywords:axcelis technologies? amd? 300mm? single-wafer? halo?

Axcelis Technologies Inc. will provide single-wafer implant technology to AMD's new 300mm fab in Dresden, Germany. AMD selected Axcelis' new single-wafer technology because it was able to meet the chipmaker's device manufacturing requirements for well and channel and high-tilt HALO implant applications in the 90nm to 45nm technology nodes.

Device scaling beyond the 90nm technology node drives the need for lower energy implant processing in all areas of the transistor. Axcelis has been developing a new single-wafer platform in anticipation of the industry's growing need for greater productivity and doping precision in high-tilt, low energy implant applications. Axcelis plans to formally unveil the new single-wafer platform early next year.

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