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August Tech adds patent to portfolio

Posted: 29 Dec 2004 ?? ?Print Version ?Bookmark and Share

Keywords:wafer? u. s. patent number 6? 826? 298?

August Technology Corp. has received a new U.S. patent number 6,826,298, for its on-the-fly inspection technology. The patent supports the company's advanced inspection technology which uses strobe illumination to freeze motion while continuously moving a wafer. This type of inspection is used to detect defects on whole, sawn and partial wafers throughout the device manufacturing process. Typical defects include particles, residue, scratches, corrosion, and edge and solder bump defects.

Cory Watkins, August Technology's CTO, explained, "The company has pioneered the advanced macro, high-speed automated wafer inspection market. This key new patent supports the core of our innovative technology which has resulted in products such as the NSX Series, the 3Di Series and the AXi Series inspection systems. With an installed base of over 300 high-speed, wafer inspection systems, we believe this patent will protect our position as the leader in advanced macro defect inspection."





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