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Mini ceramic motor automates in-vacuum alignment

Posted: 07 Jan 2005 ?? ?Print Version ?Bookmark and Share

Keywords:new scale technologies? squiggle? motor? sq-2000c? sq-2000?

New Scale Technologies Inc. has released a new vacuum-compatible version of its patent-pending mini ceramic Squiggle motor for automating critical alignments in high-vacuum instruments without requiring mechanical feed-throughs or stepper motors.

The new motors can be used for nanometer positioning in applications such as semiconductor manufacturing and testing, scanning electron microscopes, ion beam microscopes, and scanning ion mass spectrometers.

The new model SQ-2000C offers identical performance to the standard SQ-2000 but incorporates vacuum-compatible materials and design features. The company said the Squiggle motor uses piezoelectric ceramic elements to create vibrations in a threaded nut that directly turns a mating screw. This unique design delivers a 20nm resolution, tens of millimeters of stroke, quiet operation, and speed ratings of 1 to 2?m/s.

In addition to its small size of approximately 20(L)-by-10(?)mm, the motor features nanometer precision, zero magnetic fields and ultra-low outgassing and heating. Range of motion is 50mm with a force up to 5N.

The SQ-2000C products are compatible with vacuum pressures as low as 10-7 Torr. Vacuum electrical feed-throughs are available by special order.

Pricing for the motor and controller start at $1,475. Delivery is two to four weeks.

- Gina Roos

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