Global Sources
EE Times-Asia
Stay in touch with EE Times Asia
EE Times-Asia > Manufacturing/Packaging

Mattson equips ProMOS' 300mm Taiwan fab

Posted: 26 May 2005 ?? ?Print Version ?Bookmark and Share

Keywords:Mattson Technology? wafer?

Mattson Technology Inc. will be used to support the production ramp at Promos Technologies' newest 300mm wafer fab in the Central Taiwan Science Park (CTSP), Taiwan. The systems, which include the Aspen III ICPHT and the Helios, will be used in ProMOS' Fab III for the volume production of advanced memory devices, including 512Mb and 1 GDDR2 stacked capacitors with 90nm technologies.

Promos' CTSP fab will comprise two fully automated production lines with a dual-plant design. The facility is expected to produce 80,000 wafers per month by 2010, giving it the largest capacity at a single fab among all 300mm fabs.

"We plan to strengthen our competitive advantage in the DRAM market by investing our latest 300 mm fab with the highest monthly output at a single site in the global IC industry," said Dr. Len Mei, senior vice president, ProMOS Technologies. "The production goals for Fab III demand cost-efficient, state-of-the-art semiconductor equipment that will help us speed the time-to-market of our latest-generation DRAMs. Mattson's strip and RTP tools demonstrated the advanced processing capabilities and cost-of-ownership advantages that we require to meet our aggressive manufacturing targets for the 90nm technology node and beyond."

"ProMOS, one of Taiwan's leading memory manufacturers, selected Mattson Technology as a key strip and RTP supplier based on our systems' excellent processing performance and high productivity, as well as our committed customer support," said Robert B. MacKnight, chief operating officer of Mattson Technology. "These follow-on orders reinforce Mattson's leadership in Taiwan, which commands one-fifth of the world's DRAM devices, and underscore our customer's confidence in our tools to meet its volume production needs for next-generation products. We are pleased to help bring this new 300mm fab on-line and look forward to supporting ProMOS with the advanced process technologies it requires to expand its operations."

Article Comments - Mattson equips ProMOS' 300mm Taiwan ...
*? You can enter [0] more charecters.
*Verify code:


Visit Asia Webinars to learn about the latest in technology and get practical design tips.

Back to Top