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Therma-Wave sells product line to Tokyo Electron

Posted: 05 Jul 2005 ?? ?Print Version ?Bookmark and Share

Keywords:compact critical dimension-integrated? ccd-i? tokyo electron?

Therma-Wave Inc., a vendor of process control metrology systems, has agreed to sell its Compact Critical Dimension-integrated (CCD-i) product line to Tokyo Electron Ltd (TEL) for about $9.95 million.

The transaction includes certain tangible assets, intellectual property and personnel related to the application, support and manufacturing of the CCD-i product line, Therma-Wave said.

Therma-Wave said it had been supplying CCD-i products to TEL but would cease, with effect from July 1. As a result of the transaction, Therma-Wave is to remove $5.65 million in previously received orders from TEL for CCD-i products and services from the company's backlog. These orders were expected to be shipped to TEL during the remainder of the current fiscal year.

"Therma-Wave and TEL have worked together over the last several years to increase customer acceptance for the CCD-i product for optical digital profilometry (ODP) applications. By selling the CCD-i product to TEL, we will realize an immediate return on our investment in integrated metrology for track and lithography applications, receive an infusion of cash and further focus our resources on the next generation process control metrology systems," commented Boris Lipkin, president and chief executive officer of Therma-Wave, in a statement. "The acquisition of Therma-Wave's CCD-i metrology module provides a market proven and highly complementary offering to our current portfolio of semiconductor production equipment while improving TEL's ability to continuously support the needs of our integrated metrology customers worldwide," stated Hikaru Ito, vice president and general manager of TEL's Clean Track Business Unit, in the same statement.

- Peter Clarke

EE Times

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