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MKS rolls out new manometer

Posted: 09 Sep 2005 ?? ?Print Version ?Bookmark and Share

Keywords:mks instruments? 600c ebaratron capacitance manometer? manometer?

MKS Instruments Inc., a provider of process control technologies for improving productivity in semiconductor and other advanced manufacturing processes, introduced its 600C eBaratron capacitance manometer, designed for networking with Ethernet communications devices for real-time diagnostics.

This new all-digital pressure manometer incorporates MKS' Baratron capacitance technology to deliver highly accurate, reliable, stable pressure measurements to critical semiconductor and other advanced manufacturing processes. Now equipped with Ethernet communications, this manometer enables diagnostics on a real-time basis during processing, allowing users to quickly and easily perform system analysis and troubleshooting.

The advanced manometer can be either digitally networked or used as a stand-alone vacuum monitor in virtually any process or application. An embedded Internet web browser provides communications with a Windows-based PC. With a rapid datalogger (100ms), the 600C eBaratron manometer performs quick, detailed self-diagnostics and simplifies the troubleshooting of other system components.

Models can be heated to either 45C or 100C for use in harsh semiconductor and display manufacturing, as well as biopharmaceutical processes. Accuracy is better than 0.10 percent of Reading. The manometer incorporates an MKS patented particle sump to prevent process by-products from condensing on the diaphragm and causing drift, and its standard all-metal, all-welded pressure sensor has exceptional corrosion resistance from aggressive process gases.

The 600C eBaratron capacitance manometer is fully TOOLweb-compatible so it can easily communicate with MKS gateways and hubs, such as SenseLink and Blue Box. It also has analog communications capability, making it a drop-in retrofit into existing process systems.



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