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DuPont to construct NF3 plant in China

Posted: 13 Sep 2005 ?? ?Print Version ?Bookmark and Share

Keywords:semiconductor? nitrogen trifluoride? flat panel display?

DuPont's Fluoroproducts unit announced plans to construct a new manufacturing facility to produce nitrogen trifluoride (NF3), a key chamber cleaning and etch gas used in semiconductor chip manufacturing and flat panel displays.

In the plant, DuPont Fluoroproducts plans to deliver high-quality grades of its Zyron NF3 electronic gases to the global market. The new plant will have 450 tons per year of initial capacity when production starts in 2007.

The plant will be located in Changshu, Jiangsu Province in China, where DuPont Fluoroproducts has established a new multi-product complex, as part of a larger DuPont strategy to double its investment in this high-growth region from the existing $600 million to $1.2 billion by 2010.

"Flat panel displays and semiconductors are strategic growth markets for DuPont," said Brian Engler, global business manager, Zyron' electronic gases- DuPont Fluoroproducts. "We have unique capability through our patented purification technology to produce superior quality chamber cleaning gases for these markets - safely, reliably and efficiently. And because we will continue to be a leading supplier of chamber cleaning gases and technologies in these industries, we are creating the ability to expand capacity in the future as the market for NF3 continues to grow."

- EE Times

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