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IBM acquires Inficon's process control software

Posted: 31 Jan 2006 ?? ?Print Version ?Bookmark and Share

Keywords:Spencer Chin? IBM? Argus? semiconductor software? Inficon?

IBM has acquired Argus semiconductor software and related intellectual property for lithography process control from Inficon.

Inficon developed Argus as an advanced lithography process control system that gives users real-time run-to-run capability to control processes using measurement results from upstream and downstream processes. The software can help improve process yield, reduce lithography rework and improve the production ramp up.

"This acquisition further expands and strengthens our portfolio of factory process control solutions," said Joseph Nemeth, VP of semiconductor industry, IBM Engineering & Technology Services, in a statement. "We see the Argus product as providing a critical solution to the semiconductor industry in both lithography development and early prototype manufacturing and it will be a true asset to our clients."

IBM's E&TS and Microelectronics businesses will continue to provide global sales, support, and services coverage to the roster of Argus software clients. Critical development and support personnel from Inficon will join IBM.

In a related move, IBM has integrated its E&TS, OEM Microelectronics, Technology Development & Manufacturing, Intellectual Property and OEM sales divisions into a new Technology Collaboration Solutions unit. The group will partner with clients to design, create and manufacture new products, speed time-to-market to help clients enter new markets and grow their businesses.

- Spencer Chin
EE Times

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