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ATMI, TEL partner in photoresist packaging system

Posted: 23 Feb 2006 ?? ?Print Version ?Bookmark and Share

Keywords:ATMI Packaging? materials-handling? packaging system? photoresist? Tokyo Electron?

ATMI Packaging, a provider of high quality materials-handling solutions, unveiled a packaging system designed for direct pressure dispensing of advanced photoresist chemicals.

Developed in collaboration with Tokyo Electron Ltd (TEL), the PDMPak system promise to greatly improve efficiencies in the photoresist dispense process by enabling an improved track design while also minimizing microbubbles and misconnects.

"ATMI Packaging's collaboration efforts on PDMPak has ensured a successful release and provided a delivery system for TEL's next generation pump system," commented Katsuhiro Tsuchiya, TEL's track product marketing representative.

TEL worked with ATMI to develop a comprehensive pressure dispense solution that helps improve the materials' integrity by streamlining the chemical delivery system for the semiconductor manufacturing industry. According to the press release, this new yield-increasing technology provides end-users with the ability to reduce material waste and equipment maintenance, ultimately giving customers a consistent and unparalleled value platform.

The PDMPak system evolved from ATMI's NOWPak technology and is touted to be the industry's first direct pressure dispense ultra-pure, bag-in-a-bottle system. In operation, the PDMPak allows for removal of headspace gas prior to dispensing, prevents solvent loss, isolates chemicals from drive gas contamination, and enables chemicals to last longer. In addition, the PDMPak has a new ergonomic connector design providing a cost-saving misconnect-prevention feature. This new design utilizes a locking closure in combination with either a mechanical key-code or ATMI's nowTRAK RFID chemical management system.

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