Akrion sues Prosys for megasonic patent infringement

Akrion Inc. announced that it has filed a lawsuit against Product Systems Inc. (Prosys) in a U.S. federal court for allegedly infringing five patents and committing unfair competition practices. All of the patents at issue relate to megasonic-assisted cleaning. Akrion alleges that Prosys' sale of certain single-wafer megasonic cleaning products and megasonic batch processing systems infringe one or more of its patents.

According to Akrion president Jim Molinaro, "Akrion and its predecessors have spent substantial resources in pioneering and developing the successful application of megasonic-assisted cleaning for both single-wafer and batch processing applications in the semiconductor industry. This development work resulted in a considerable worldwide patent portfolio, especially in the field of single-wafer megasonics. Akrion will not stand idly by as competitors attempt to use our patented technology to enter the market."

To date, Akrion owns over 50 issued patents and over 60 patent applications pending worldwide.