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Aviza ships atomic layer deposition system to Taiwan's Inotera

Posted: 31 May 2006 ?? ?Print Version ?Bookmark and Share

Keywords:Celsior? atomic layer deposition? Aviza? Inotera?

Aviza Technology Inc. announced the shipment of the Celsior single wafer atomic layer deposition (ALD) system to Inotera Memories Inc. of Taiwan. The Celsior system is slated for use at Inotera's Fab I for production of its 90nm and 75nm DRAM chips.

"We believe Celsior's features better control the process and enable low cost of ownership for high-volume manufacturing to meet the challenges of the ALD technique," said Subrata Chatterji, vice president and general manager, ALD business unit at Aviza Technology. As our partnership continues to grow, we look forward to supporting Inotera's future manufacturing needs."

According to Aviza, a key feature of Celsior is its platform, which was acquired through a joint development partnership (JDP) with Trikon Technologies prior to the Aviza/Trikon merger transaction. The same software platform was used in chemical vapor deposition, physical vapor deposition and etch systems in production environments.

Celsior also features a chamber that aims to provide increased throughput, lower chemical consumption and extended process window. Celsior's showerhead is designed for ALD process needs, and has less than 1 percent thickness uniformity requirements across a 300mm wafer. The system is based on a central transfer hub. Celsior is extendible, allowing the addition of process chambers for adding future capacity or new technology.

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