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UV laser systems ease wafer dicing, micromachining

Posted: 10 Jul 2006 ?? ?Print Version ?Bookmark and Share

Keywords:JPSA? IX200 ChromaDice? wafer dicing system?

JPSA's wafer dicing system

J. P. Sercel Associates (JPSA) has introduced its new IX200 series of laser systems, available in UV diode-pumped solid-state (DPSS) and Excimer UV laser configurations. According to the company, the IX200 ChromaDice DPSS version is a high-precision wafer dicing (singulation) system also suitable for wafer trimming and scribing applications.

The equipment's DPSS laser system promises high-speed wafer dicing and cutting. The process is tolerant of wafer warp and bow and suitable for all wafer types. The system is also available in an excimer laser version for via drilling, micromachining, thin film patterning and other semiconductor packaging applications including LED liftoff.

The Class 1, fully enclosed IX200 ChromaDice is available in 266nm or 355nm UVDPSS laser wavelengths for a wide range of process capabilities. It can achieve cuts as narrow as 2.5&956;n, promising as much as 24 percent more die per wafer with die yields greater than 99 percent. JPSA said the equipment delivers excellent results on GaAs, Si and other materials and scribes up to 6-inch wafers, including sapphire LED wafers.

The IX200 ChromaAblate system is an excimer laser configuration. At a 248nm wavelength, it is suitable for micromachining of Si, GaN, GaAs and other IIIV materials, as well as polymers, ceramics and many others. An optional 193nm beam delivery package is also available, said JPSA, useful for polymers that do not couple well with the longer UV wavelength (e.g., Pebax), as well as many of the more optically transparent materials that do not machine well under 248nm wavelength UV laser energy.

"The IX200 is a new series of industrial grade UV laser workstation, competitively priced and designed to pay for itself in months rather than in years. Despite its lower initial investment, it delivers industrial grade, robust performance; it is truly a cost-effective tool for 24/7 production," said JPSA President Jeffrey Sercel in a statement.

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