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Micron joins IMEC's 32nm research platform

Posted: 14 Jul 2006 ?? ?Print Version ?Bookmark and Share

Keywords:CMOS? research? IMEC? Micron? 32nm?

IMEC, an independent nanoelectronics and nanotechnology research institute, recently announced that Micron Technology Inc., a provider of memory, storage and imaging semicon products, joined IMEC's (sub)-32nm CMOS research platform as core partner. Micron will also participate within IMEC's advanced flash memory program.

"We are excited that Micron joins both our core and advanced flash memory program," said Gilbert Declerck, president and CEO of IMEC. "Up to now, IMEC's (sub)-32nm CMOS research program focused mainly on logic with SRAM as demonstrator cell."

IMEC reported that important milestones have recently been achieved within the institute's 300mm research facility. The installation of the back-end-of-line equipment was finished beginning July, with first full-flow lots being processed. Interconnect R&D for the 32nm node has commenced on 300mm and first results are expected early Q4 2006.

At present, some programs are shifting focus to deal with the challenges for the 32nm technology node. The advanced litho program runs hyper-NA immersion, double-patterning immersion and extreme ultraviolet lithography in parallel. In the front-end program, advances were achieved on the use of fully-silicided gates; metal-inserted poly gates will become the point of emphasis for the coming year. The interconnection program is currently studying low-k materials with k value lower than 2.5.

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