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Electrofill system supports 45-/32nm nodes

Posted: 14 Jul 2006 ?? ?Print Version ?Bookmark and Share

Keywords:Novellus? SABRE Extreme? copper electrofill system?

Novellus Systems Inc. has introduced SABRE Extreme, the latest generation of the company's SABRE Electrofill system. With the flexibility to evolve for multiple-generation applications, the company said its new platform offers enhanced chemistry, process refinements and new hardware features to tackle the complex transition to the 32nm technology node. The new system is currently being used in development for 45nm by a logic customer and a DRAM manufacturer in the United States.

With a market share of 80 percent in 2005, Novellus said its SABRE Electrofill system is the process tool of record for nine of the top 10 copper IC producers. The installed base of more than 250 systems worldwide processes more than 55 million wafer passes annually, and with the company's backward compatibility strategy, manufacturers can continue to leverage their installed fleet as they transition to 45nm and 32nm. The company said the new SABRE Extreme enables a throughput of 80 wafers per hour while continuing to deliver 90 percent availability in high volume production.

"When the first SABRE system was introduced in 1998, it drove the industry's transition from aluminum to copper interconnects, and it has since become the industry standard tool for copper electrochemical deposition," said David Smith, VP and general manager of Novellus' Electrofill Business Unit. "In addition to widespread adoption for advanced logic technology, we are now seeing memory chip manufacturers increasingly adopting SABRE to achieve the performance benefits of copper. With its advanced technology, SABRE Extreme easily meets the aggressive technology requirements while offering productivity benefits via higher throughput and lower cost of ownership."

SABRE Extreme incorporates a number of enhancements for high volume manufacturing at 45nm and 32nm, Novellus said, targeted at providing value to customers through leading technology and enhanced productivity.

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