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Excimer laser promises performance, long lifespan

Posted: 27 Jul 2006 ?? ?Print Version ?Bookmark and Share

Keywords:Coherent? ExciStar XS? excimer laser?

Excimer laser

The new ExciStar XS from Coherent Inc. is a compact, economical excimer laser that promises exceptional performance and lifetime characteristics. The air-cooled ExciStar XS measures 649-by-300-by-400mm and delivers up to 10mJ/pulse at 193nm with an energy stability of The ExciStar XS can operate at 157nm (F2), 193nm (ArF), 248nm (KrF), or 351nm (XeF). Its compact size and low total cost of ownership will make the ExciStar XS attractive to laboratory and research users, Coherent said, especially for marking applications. The ExciStar XS is RoHS compliant.

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