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MEMS flow sensors target medical apps

Posted: 21 Mar 2007 ?? ?Print Version ?Bookmark and Share

Keywords:MEMS? sensor? flow sensor? Omron? thermopile?

Omron announced the D6F series of MEMS flow sensors, said to be the first to use thermopile technology that converts thermal energy into electrical energy to more accurately and efficiently measure air/gas flow speed in medical applications.

The D6F series measure flow speed from 1mm/s to 40m/s. The sensors measure15-by-20-by-60mm, operate over the temperature range of -10C to 60C with a supply voltage of 12-24Vdc while consuming only 15mA. It features an integral orifice with an analog output of 1-5Vdc. Applications include oxygen concentrators, inhaled anesthetics, heliox, CPAP and ventilator applications.

The new thermopile method is said to deliver a variety of advantages including low-cost implementation, low-power consumption, accurate measurement and high sensitivity. In comparison, conventional flow sensors use a resistance measurement method by tracking the electrical resistance change of a material due to changes in temperature. This method requires a labor-intensive adjustment of the resistance balance, said the company.

MSRP for the D6F-01A1-110, with an airflow range of 0 to 1L/min, is $72.41. For the D6F-20A5-000, with an airflow range of 0 to 20L/min, MSRP is $125.40. Both are in quantities of 100. Delivery is from stock to eight weeks. Engineering samples and a complete set of technical data are also available.

- Gina Roos

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