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MEMS flow sensors suit medical applications

Posted: 02 Apr 2007 ?? ?Print Version ?Bookmark and Share

Keywords:flow sensors? MEMS sensor? MEMS flow sensor?

Omron Electronic Components LLC has announced the availability of the D6F series of MEMS flow sensors that have the ability to measure flow speed from 1mm/s to 40m/s. The flow sensor uses a thermopile element that converts thermal energy into electrical energy. Conventional flow sensors use a resistance-measurement method, which tracks the electrical resistance change of a material due to changes in temperature. It requires a labor-intensive adjustment of the resistance balance.

The D6F operates from -10C to 60C with a supply voltage of 12-24Vdc while consuming 15mA. It has an integral orifice with an analog output of 1-5Vdc and measures 15-by-20-by-60mm. The D6F series is suitable for oxygen concentrators, inhaled anesthetics, CPAP and ventilator applications.

The devices are already available starting at $72.41 each in 100-piece quantities.

- Emily Gleason

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