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Characterizing electromagnetic MEMS optical switch actuators using the Agilent E4980A precision LCR meter

Posted: 31 May 2007 ?? ?

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Keywords:electromagnetic MEMS? optical switch actuators? precision LCR meter?

This application brief describes how the Agilent E4980A precision LCR meter improves the test efficiency of electromagnetic MEMS optical switch actuators.

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Related Info

What does MEMS stand for?
MEMS stands for microelectromechanical systems. They are tiny mechanical devices that are built onto semiconductor chips and are measured in micrometers. They are used to make pressure, temperature, chemical and vibration sensors, light reflectors and switches as well as accelerometers for airbags, vehicle control, pacemakers and games.

Characterizing electromagnetic MEMS optical switch actuators using the Agilent E4980A precision LCR meter

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