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Accurate evaluation of MEMS piezoelectric sensors and actuators using the Agilent 4294A precision impedance analyzer

Posted: 20 Jun 2007 ?? ?Print Version ?Bookmark and Share

Keywords:piezoelectric sensors? impedance analyzer? Agilent 4294A?

This application brief describes the benefits of using the Agilent 4294A for device characterization of MEMS piezoelectric sensors and actuators, along with its wide variety of analysis functions and features and how it improves design efficiency.

View the PDF document for more information.

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