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450mm tool testing facility in Sematech's agenda

Posted: 30 Oct 2007 ?? ?Print Version ?Bookmark and Share

Keywords:factory integration test bed? 450mm fab? chip-equipment makers?

Sematech is proposing to establish a "factory integration test bed" facility for the development of 450mm fab tools.

The facility, to be located in Austin, Texas, could help propel the 450mm era. Intel, Samsung, TSMC and Toshiba are interested in building 450mm fabs, but the IC-equipment community remains reluctant due to the sheer costs of the technology.

The proposed facility would help enable chip-equipment makers to develop and test their prototype 450mm tools and subsystems, such as the carriers, load ports, modules and other items, said Frank Robertson, who manages the external programs department in Intel Corp.'s Technology and Manufacturing Group.

The goal is to test an AMHS system and the interoperability of these subsystems, according to Sematech.

Sematech is reportedly looking to put the 450mm "interactive test bed" facility at the Advanced Technology Development Facility, the consortium's R&D foundry. However, Sematech has put the R&D foundry up for sale. Some private-equity firms are looking to buy the unit.

- Mark LaPedus
EE Times




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