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Epson Toyocom applies QMEMS on pressure sensors

Posted: 26 Sep 2008 ?? ?Print Version ?Bookmark and Share

Keywords:technology QMEMS? pressure sensor? crystal quartz?

Epson pressure sensor

Epson Toyocom Corp. has developed an extremely small, high-performance quartz crystal atmospheric pressure sensor that employs an original pressure-sensing structure using QMEMS technology. The new sensor has a cubic volume of only 12.5cc and weighs just 15g yet is accurate to within 10 Pa, or about 1/10,000 of one bar, and boasts a resolution of 0.1 Pa. Commercial development is scheduled for completion sometime next year.

According to Epson Toyocom, in the past, pressure sensors have generally had to trade off performance for smaller size, and those for high-performance applications tended to be larger. The company however resolved this issue with its latest crystal pressure sensor that it claims provides both high accuracy and high resolution in a diminutive package, backed by an extremely stable oscillating frequency provided by the tuning-fork crystal unit, which serves as a pressure-sensing element, and to a newly developed original pressure-sensing structure made possible by QMEMS technology.

Applications for the new pressure sensor include accurate measurement of barometric pressure in meteorological observations; measuring differences in elevation (in approximately one centimeter increments) using barometric pressure; and detecting slight changes in internal pressure resulting from the opening and closing of inside doors and windows.





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