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MEMS on-wafer evaluation in mass production

Posted: 31 Mar 2009 ?? ?Print Version ?Bookmark and Share

Keywords:MEMS? on-wafer production? sensor? application note?

Recently, various devices using MEMS technology such as pressure sensors, accelerometers, and RF MEMS have been commercialized. Additionally, new devices such as silicon microphones have been evolving rapidly. The MEMS market started with the automotive industry and has been expanding to consumer products such as cellphones.

This MEMS market expansion also applies pressure on manufacturers to lower their costs per unit. However, few opportunities exist, mainly due to:

? Low yields due to the precision process
? Slow throughput due to applying the physical stimulus.

A recent study attributes 80 percent of the total production cost to the device packaging process, so defective chip inflow to the packaging process contributes to the cost rise. This paper will discuss how to evaluate MEMS elements at the on-wafer stage in order to lower the total production cost.

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