Novellus, Albany NanoTech team on sub-22nm R&D

As part of the agreement, Novellus will install three advanced thin film deposition tools-a VECTOR plasma-enhanced chemical vapor deposition system, a SABRE copper electrochemical deposition system, and an ALTUS tungsten chemical vapor deposition system-at CNSE's world-class Albany NanoTech Complex.

A team of Novellus researchers will be located with CNSE staff at Albany NanoTech to research advanced nanofabrication processes, including copper fill for interconnects, copper through-silicon via fill for 3D packaging applications, tungsten deposition for transistor contacts, and thin dielectric film deposition. The development and commercialization of these technologies is critical to ensure continued progress in the manufacturing of advanced electronic devices, while also enabling improvements in nanoscale fabrication that can be applied to emerging applications in telecommunications, biotechnology, medicine, energy, and the environment, among others.

Tom Caulfield, executive VP of sales, marketing, and customer satisfaction at Novellus said that the company is pleased to engage in this next-generation R&D program in collaboration with the CNSE. "Combining the technological expertise of Novellus, with the intellectual know-how and assets of CNSE, will accelerate the development of innovations needed to drive our industry forward."

"I am delighted to welcome Novellus Systems to the UAlbany NanoCollege, where it joins an ever-expanding list of global companies engaged in world-class nanoscale research, development and product commercialization," said Alain Kaloyeros, senior VP and CEO of CNSE. "Under the leadership of chairman and CEO Richard Hill, Novellus has established itself as an international leader in nanoelectronics manufacturing technology. This partnership once again demonstrates the success of the vision, strategy and investments of Governor Paterson and Assembly Speaker Silver in supporting New York's globally-recognized nanotechnology industry, which is attracting high-tech jobs, companies and investments while providing new and exciting career opportunities for New Yorkers in our 21st century innovation economy."

The agreement between Novellus and CNSE also includes the potential for further R&D initiatives in the future, which may involve the location of additional Novellus employees and tools at CNSE's Albany NanoTech.