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Imec, Coventor team for MEMS design, manufacturing

Posted: 04 Feb 2011 ?? ?Print Version ?Bookmark and Share

Keywords:MEMS? CMOS? SiGe? manufacturing?

Coventor and Imec have formed a strategic partnership for the development of CMOS integrated MEMS.

The partnership aims to improve and expand the use of advanced design and manufacturing techniques for MEMS, making MEMS more accessible to both MEMS and IC designers. It includes strategic alignment on R&D roadmaps and collaboration on advanced research topics. Specifically, the partnership will have teams of Imec and Coventor collaborating on expanding Imec's use of Coventor's software tools suite for MEMS and IC design. They will jointly develop process design kits (PDKs) for Imec's SiGe MEMS-above-IC process.

This process technology uses a MEMS-last approach, where the MEMS are processed after and on top of the CMOS circuits, enabling a monolithic integration of MEMS devices with the driving and readout electronics on the same die. The SiGe MEMS platform's flexible and modular approach also allows application-specific tuning and optimization of MEMS layer thicknesses and properties, and the processing of optional functional layers on top of the MEMS devices.





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