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Metrology tool boasts improved modeling capability

Posted: 01 Apr 2011 ?? ?Print Version ?Bookmark and Share

Keywords:metrology? modeling software? Spectrashape?

KLA-Tencor Corp. has introduced the SpectraShape 8660 and 8810 dimensional metrology systems, featuring AcuShape2 modeling software developed jointly with Tokyo Electron Ltd (TEL). The SpectraShape tools are able to fully characterize the three dimensional shapes of complex features on ICs and monitor these shapes at production speeds. The performance of these tools is critical when engineers are faced with complicated structures such as high-k metal gates, where sub-nanometer profile variations can have significant impact on transistor performance, or dual-damascene contacts, where a small modulation in the bottom diameter can seriously impact device yield or reliability.

Despite considerable process control challenges, IC manufacturers have begun to incorporate geometrically complex structures in order to garner more performance from each square centimeter of a silicon wafer. For these structures, the top-down view that a critical dimension scanning electron microscope (CD-SEM) provides may not be sufficient for ensuring that the structures are being built to specifications. KLA-Tencor's SpectraShape systems use an array of optical technologies to characterize the structures comprehensively and rapidly. Patented algorithms combine and analyze the multiple signals to produce a detailed description of the shape of an IC feature and identify deviations beyond allowed tolerances. With their multichannel design, the SpectraShape 8660 and 8810 systems have broad applicability across the IC fab, from the early layers of leading-edge transistors to the last interconnect layers.

The AcuShape2 software streamlines the modeling process for both KLA-Tencor's standalone and TEL's integrated metrology (IM) systems. The SpectraShape 8810 adds a deep ultraviolet illumination option, different from the 8660, to improve sensitivity for advanced materials.

The SpectraShape dimensional metrology systems with AcuShape2 software have been shipped to several leading-edge semiconductor fabs in the United States and Asia.

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