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Using FE-SEM in MEMS analysis

Posted: 13 Mar 2012 ?? ?Print Version ?Bookmark and Share

Keywords:Scanning Electron Microscope? MEMS?

Among the multitude of scientific instrumentation used to characterize microelectromechanical

systems (MEMS), scanning electron microscope (SEM) is one of the most common. Because of the ubiquitous need for SEM images in MEMS analysis, a new breed of instruments, the compact or bench top SEM, is garnering attention. These smaller SEMs will not replace the full suite of analytical capabilities of the full-size instruments; however, their ease of use and quick, high resolution images allows for operators with a wider range of SEM skill level. The compact SEM improves overall efficiency and analysis time, allowing researchers to quickly image the MEMS when only an image is needed to guide further analysis.

Agilent's 8500 compact FE-SEM is a low voltage, field emission SEM which employs an electrostatic lens design. This design is touted to allow for high resolution imaging of MEMS devices, typically without the need for metal coating. The 8500 FE-SEM was used to image three types of MEMS: atomic force microscope (AFM) cantilevers, airbag accelerometers, and resonators.

View the PDF document for more information.

Originally published by Agilent Technologies Inc. at as "The Role of a Compact Low Voltage FE-SEM in MEMS Analysis".

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