MEMS gas flow sensors do without moving parts

Designed without any moving parts in the system, the module claims high dynamic range (turn-down ratio and sensitivity) and high reliability (no wear mechanisms), as well as small size, low power consumption, and fast response time.

The MFA1100R's sensing element is integrated in a monolithic CMOS process with on-chip signal processing and embedded software. The module operates over a flow range of 0 to 100SLM, and has a very low startup rate of 0.2SLM, and a turndown ratio greater than 500:1. Other key specifications include an accuracy of ±1.5 percent, repeatability and hysteresis of better than ±1 percent and response time The MFA1100R design is a full electronic MEMS gas flow sensor module that can be integrated into either a wired or a wireless system. It is suited for advanced metering infrastructure or smart meters.

The MFA1100R is RoHS compliant and operates from 2.7V to 5.5V over the -20°C to + 60°C. It is available in sample quantities, with unit pricing of $199 at 10 unit quantities.