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Samsung to invest $345.5 million in Lithography dev't

Posted: 29 Aug 2012 ?? ?Print Version ?Bookmark and Share

Keywords:extreme ultraviolet? lithography tool development? 450-mm development programs?

Samsung Electronics Co. Ltd. has announced plans to invest $345.5 million to ASML Holding NV's extreme ultraviolet (EUV) AND 450-mm lithography tool development. The Korean giant also plans to buy a 3 percent stake in the Dutch lithography vendor at an estimated price of $629.5 million.

With this move, Samsung joins Intel Corp. and Taiwan Semiconductor Manufacturing Co. Ltd. in investing in ASML to support the development of next generation EUV and 450-mm lithography tools. TSMC said earlier this month it would pay about $1.04 billion for a 5 percent stake in ASML and Intel announced in July it would buy about 15 percent of ASML for about $3.1 billion. Both Intel and TSMC also agreed to pay to fund ASML's EUV and 450-mm tool development.

ASML announced earlier this year that it was willing to sell up to 25 percent of the company to chip vendors that wish to participate in its EUV and 450-mm development programs.

Samsung, Intel and TSMC are supporting the development of EUV lithography to replace 193-nm optical lithography for future chip scaling. All three are also eager to move to 450-mm wafers from current 300-mm wafers to improve their profit on each wafer processed.

Samsung's investment completes ASML's five-year program for EUV and 450-mm R&D, ASML said, bringing the total investment from the chip firms to 1.38 billion euro (about $1.72 billion). ASML said it wouldn't solicit participation from any other customers.

- Dylan McGrath
??EE Times

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