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Intel, STM and IBM to showcase IC manufacturing advancements

Posted: 26 Sep 2012 ?? ?Print Version ?Bookmark and Share

Keywords:FinFET technology? 22nm? ultra-thin box and body? SoC platform?

Progress reports made by Intel and the research partnership built around IBM and STMicroelectronics are set to be made during the International Electron Devices Meeting which will be held in San Francisco.

A FinFET approach on fully-depleted silicon-on-insulator (FDSOI), which Intel calls "tri-gate", and bulk planar processes at around 20nm and beyond are set to be presented by research teams.

Intel will present a paper on its 22nm FinFET technology for SoC applications. In the same session, a team of researchers from CEA-Leti, STMicroelectronics, IBM, Globalfoundries and Renesas will present a paper on ultra-thin box and body (UTBB) FDSOI transistors for a multiple threshold voltage strategy at 20nm and below.

ST will also report on switching energy efficiency in the UTTB process while IBM will describe a 22-nm SOI process. Meanwhile, Samsung researchers will deliver a research paper on the extensibility of its bulk 20-nm planar HKMG process.

Intel is already making processors using a 22-nm FinFET manufacturing process technology. It will describe its approach as a CPU process and has said the process has not being optimised for lowest power consumption. Intel also will provide engineering details of its 22-nm tri-gate SoC process and discuss its use of the approach to build a technology platform for SoC applications.

That implies broad families of high-speed, low standby power and high voltage tolerant transistors, as well as RF and mixed-signal capabilities, according to the paper's abstract.

High-speed logic transistors have sub-threshold leakages ranging from 100-nA per micron to 1-nA per micron, while the low-power versions feature a leakage of less than 50-pA per micron. Nonetheless, the process retains 1.8- and 3.3V transistors for analogue circuits, and legacy circuits.

The Intel 22-nm SoC platform also includes carbon-doped oxide interconnect and three different types of SRAM bit cell to provide options between density, performance and low voltage operation, according to the abstract.

In another session on Dec. 11, a paper authored by a team from IBM, STMicroelectronics, Globalfoundries, Renesas, Soitec and CEA-Leti will report on another SOI process at 22-nm known as ETSOI for extremely thin silicon-on-insulator. This process has a silicon channel for n-type transistors and strained silicon-germanium channel for p-type transistors.

IEDMruns from Dec. 10 to 12 at the Hilton San Francisco Union Square.

- Peter Clarke
??EE Times

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