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Imec offers fully integrated silicon photonics platform

Posted: 18 Mar 2013 ?? ?Print Version ?Bookmark and Share

Keywords:silicon photonics? CMOS? ePIXfab? optical transceiver?

Imec has unveiled its fully integrated silicon photonics platform through a cost-sharing Multi-Project Wafer (MPW) service via ePIXfab. According to Imec, the platform enables cost-effective R&D of silicon photonic ICs for high-performance optical transceivers (25Gb/s and beyond) and optical sensing and life science applications. The offered integrated components include low-loss waveguides, efficient grating couplers, high-speed silicon electro-optic modulators and high-speed germanium waveguide photo-detectors.

Imec extends its silicon photonics offering, using a standard130nm CMOS toolset, with active components such as high-speed optical modulators and integrated germanium photo-detectors. The Si Photonics 200mm wafer platform claims to offer extensive design flexibility and includes tight within-wafer silicon thickness variation 3 Additionally, the platform features Ge epitaxial growth on Si and p-type and n-type implants in Ge, local NiSi contacts, tungsten vias and Cu metal interconnects, Al bond pads, validated cell library with fibre couplers, polarisation rotators, highly efficient carrier depletion modulators and ultra-compact Ge waveguide photo-detectors with low dark current, and design kit that supports Ipkiss, PhoeniX and Mentor Graphics software.

The first run opens for registration with tape-in on 9th of Oct 2013 and first devices will be out in May 2014. Support, registration and design kit access will be organised by Europractice IC service, in collaboration with worldwide MPW partners.

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