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Vacuum pump tweaked for Applied Materials' platforms

Posted: 11 Jul 2013 ?? ?Print Version ?Bookmark and Share

Keywords:Edwards Group? point-of-use pump? Precision bearings?

Edwards Group Limited has unveiled a new integrated point-of-use pump, the IPUP2, for load lock and transfer chamber applications on Applied Materials' manufacturing platforms.

The IPUP2 was designed to meet Applied Materials' specifications for load lock and transfer chamber pumping. The pumping speed and power curve of the IPUP2 boasts increased tool throughput, achieving a peak pumping speed (180 m3/h) 89 per cent faster and pump down times up to 54 per cent faster than 1st generation pumps, while using 70 per cent less energy (additional energy savings can be achieved using Green Mode).

Precision bearings throughout the pump ensure smooth, low vibration operation, while oil lubrication of bearings and timing gears eliminate the need for routine maintenance between major overhauls. The IPUP2 includes horizontal and vertical inlets and its size and configuration permit direct swaps with previous generation pumps. In testing, the pump scored highly with a mean time between failures (MTBF to Semi E10 standards) of over five years with in excess of 3,000,000 load lock cycles.

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