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Shimadzu unveils compact turbo molecular pumps

Posted: 30 Aug 2013 ?? ?Print Version ?Bookmark and Share

Keywords:turbo molecular pump? flat panel display? manufacturing?

Shimadzu Corp. has announced a line of compact turbo molecular pumps (TMPs) with integrated power supplies and 3000L/s class pumping speeds for semiconductor and flat panel display manufacturing industries. According to the company, the TMP-X2905/X3405 series aims to cut the costs and downsizing the footprint of manufacturing flat panel displays and semiconductor devices.

The pumps in this series are extremely versatile, being compact with integrated power supplies for installation in both light and hard processes, noted Shimadzu. The firm added that is has begun selling the TMP-V series of pumps with integrated power supplies for pumping inert gases used in sputter systems for 'light processing'. The TMP-X series were developed for pumping corrosive gases used in etching equipmentso called 'hard processing'.

Notably, the TMP-X series will offer pumping speeds from 300-4000L/s to address the multi-faceted needs of semiconductor and flat panel display manufactures.

Redesign of conventional integrated power supply TMP enabled a 15 per cent reduction in the height of the new pump whilst maintaining the pumping performance. Also, the TMP-X pumps are almost the same size as the main body of conventional TMP with separate power supply cables that are used for hard processing. Pumps in the TMP-X series do not require racks and cablesas is the case in conventional separate power supply TMPthus this series offers a greater degree of freedom in the design of low cost, small footprint manufacturing equipment.

The incorporation of a pump temperature control function and improvement of the motor power output has enabled the use of the TMP-X series of pumps for manufacturing processes involving high gas flow rates and reactive gases.

The use of a newly developed power unit and high efficiency motor has enabled a 15 per cent reduction (under conditions of zero load) in the power consumption compared to conventional turbo molecular pumps. This series of TMP have a low load impact on the environment, added the firm.

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