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Five MEMS devices unveiled at MEMS Exec Congress

Posted: 20 Nov 2013 ?? ?Print Version ?Bookmark and Share

Keywords:Bosch? MEMS? sensor? Bosch? Internet of Things?

At the recent MEMS Executive Congress, Bosch has rolled out a couple of MEMS chips, leveraging its expertise in consumer electronics for the connected Internet of Things (IoT) applications. The first is an inertial measurement unit (IMU) for non-safety automotive applications. By incorporating the inexpensive MEMS technologies used in its consumer chips, the SMI130 IMU targets in-cabin applications in automobiles that do not demand the precision or expense of its automotive-grade accelerometers and gyroscopes, noted the firm.

The SM130 houses a 16bit three-axis gyroscope and a 12bit three-axis accelerometer in the same 3 x 4.5mm package. The IMU is fully certified under the Automotive Electronics Council (AEC) Q100 stress test qualification for ICs, but is designed for non-safety applications including image stabilization of on-windshield head-up displays, in-cabin navigation systems and telematic motion-control applications.

The second chip Bosch debuted at the MEMS Executive Congress is the key enabler for thermal imaging.

infrared sensor

Bosch's far infrared sensor array (SMO130) takes thermal images with a focal plane array (center) that is suspended over a cavity for thermal isolation. (Source: Bosch).

Bosch's far infrared sensor array (SMO130) allows thermal images to be made with its 82 x 62 pixel focal plane array (FPA). Enabled by suspended silicon thermo-diodes, with a cavity underneath for thermal isolation, this low-cost infrared sensor array has a thermal resolution of 200mK and has a frame rate of 9fps.

Besides thermography applications, such as building inspection, process control, service and maintenance, the SMO130 will also be used for its night-vision and flame-detection capabilities in security and as well as for "people counters" in surveillance applications and for climate and heat monitoring in building automation applications.

Also at the MEC, a line of high-precision temperature-compensated pressure sensors debuted from Merit Sensor of South Jordan, Utah, which was founded because its parent company, Merit Medical Systems. Merit Sensor has diversified to become a Tier 1 supplier to the automotive, medical and industrial markets for high-precision, ultra-reliable pressure sensors.

pressure sensor

Merit Sensor's temperature-compensated pressure sensors use back-side entry to keep media from contacting with the top side of the pressure sensing die where the electronics are housed. (Source: Merit Sensor).

Merit Sensor's high-precision, temperature-compensated TR Series of pressure sensors allow the medium whose pressure is being measured to use a back-side entry that prevents it from ever coming in contact with the top side of the pressure sensing die where the electronics are housed.

Also at MEC, Memsic Inc. of Andover, Mass., announced a three-axis magnetometer, a digital compass, using its proprietary anisotropic magnetic resistive (AMR) technology, which the company claims employs the Hall effect and giant magneto-resistive techniques used by other manufacturers. The model claims to offer four-times better resolution, 25 percent lower noise and is in a 33 percent smaller package measuring just 1.6 x 1.6 x 0.6mm. Besides providing the digital compass function for smartphones and tablets, Memsic's magnetometer is also aimed at gaming consoles, automotive and indoor navigation applications.

Also at the MEC, Kionix announced that its Micro-Amp Magnetic Gyro (KMX61G) had received Windows 8.1 certification, validating that its novel synthetic gyro works as claimed. Traditional gyros are a current sink, running down the battery of mobile devices more than any other MEMS sensor. Kionix's synthetic gyro synthesizes the gyro's rotational information using sensor fusion algorithms on its three-axis accelerometer and three-axis magnetometer, as a result consuming as little as one tenth the power of a traditional nine-axis solution.

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