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CyberOptics expands WaferSense line with 450nm devices

Posted: 20 Dec 2013 ?? ?Print Version ?Bookmark and Share

Keywords:CyberOptics? wafer? measurement device? Bluetooth?

CyberOptics Corp. has introduced a set of WaferSense offerings to support the semiconductor industry's 450mm wafer initiative. According to the firm, WaferSense products are wireless, wafer-shaped, real-time measurement devices that travel through fabrication tools like actual wafers do. Measurements are reported via Bluetooth communication to allow for in-situ real-time adjustments.

Mark Hannaford, global sales director for CyberOptics' semiconductor products, said: "The WaferSense family is comprised of five models, all of which are now available in 450mm, including AGS for chamber gap measurement, ALS for leveling, ATS for robot teaching, AVS for vibration measurement and APS for particle detection."

He continued, "WaferSense products for 200mm and 300mm wafers have been available since 2004. These unique, proprietary products are used by most fabs and OEMs, including the three largest chip manufacturers, to improve yield and tool uptime. The confidence of our customers in WaferSense products has been demonstrated over the years through significant recurring orders."

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