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MEMS plus piezoelectric equates to greater miniaturisation

Posted: 28 Aug 2014 ?? ?Print Version ?Bookmark and Share

Keywords:MEMS? piezoelectric? miniaturisation? ROHM?

ROHM has developed a process that utilises thin-film piezoelectric elements, which was used to implement a MEMS foundry business that integrates product design and manufacturing processes, from wafer pulling to mounting.

The MEMS process provides complete control of product manufacturing for unsurpassed quality and flexibility, and allows round-the-clock operation to speed up development while enabling early production start-up. It can also support expanded production capacity from 600K/M to 2000K/M.

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Source: ROHM

Piezoelectric elements, while possessing the inherent property of generating a voltage when pressure is applied, have outstanding energy-saving characteristics, requiring very little power during standby.

The combination of piezoelectric elements and MEMS technology streamlines design and reduces the size of processing controllers, contributing to increased performance, lower costs, and greater end-product miniaturisation.

ROHM said it has begun conducting joint development of piezoelectric MEMS products based on customer requirements in line with its plans to gradually expand its production lines to accommodate growth markets, such as industrial inkjet printers, sensors, and wearable devices.

However, in the device creation of piezoelectric MEMS, thin-film deposition that possesses high piezoelectric properties and precision fabrication and moulding of micro-piezoelectric elements are difficult to realise.

Furthermore, high-precision processing is required for the MEMS drive block, and additional knowledge and expertisealong with the cultivation of new technologiesare needed in order to support next-generation applications and emerging markets.

ROHM mentioned that it is actively looking to address the said challenges, and is engaged in the research of thin-film piezoelectric elements. The company attributes its success in establishing a manufacturing process at LAPIS Semiconductor Miyazaki to the findings of Professor Isaku Kanno of the Graduate School of Engineering at Kobe University on evaluation measurement methods for thin-film piezoelectric elements, and the synergy created by combining the collective production technologies of the entire ROHM Group, LAPIS high-sensitivity MEMS/mounting technology, and Kionix MEMS miniaturisation technology.

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