Entegris touts dispense system for 3D and MEMS applications

Entegris introduced the IntelliGen MV, an addition to its IntelliGen family of two-stage dispense technologies used microelectronics manufacturing. The IntelliGen MV extends upon the proven performance of the IntelliGen Mini and HV dispense systems with a solution designed for 3D and MEMS applications, enabling high-purity filtration and repeatable dispense of mid-viscosity fluids.

"With the growth of 3D IC technology and MEMS, manufacturers are requiring a higher level of throughput and greater filtration capabilities to meet their unique process demands," said Entegris Chief Operating Officer Todd Edlund.

"Each application requires an intensive focus on real-time, interactive diagnostics and feedback. The IntelliGen MV provides several new diagnostic and detection features to reduce defects, simplify recipe programming and improve filter priming," he added.

The IntelliGen MV Dispense System's compact design allows manufacturers to install multiple dispense systems into a single track with the ability to process several chemistries simultaneously and filter even the most sensitive photochemicals between 100 and 300 centipoise.