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Peek inside the first high bandwidth memory

Posted: 14 Aug 2015 ?? ?Print Version ?Bookmark and Share

Keywords:SK Hynix? high bandwidth memory? graphics card? through silicon vias? TSVs?

SK Hynix, the Korean memory chip manufacturer, unveiled its high bandwidth memory (HBM) product in early 2014, claiming it to be the world's first 8Gb module made using 2Gb, 20nm node, DDR4 SDRAM. It took nearly a year for the HBM modules to show up in a downstream product: in this case, AMD's Radeon 390X Fury X graphics card.

We at TechInsights have a few of the Fury X cards in our lab and its GPU unit is shown below in Figure 1. The GPU die is seen in the centre of the module with four Hynix HBM memory modules arranged around its perimeter. Both the GPU and the HBM modules are flip-chip bumped to a UMC fabbed interposer. This interposer is, in turn, bumped to a laminate substrate. The GPU is massive measuring in at 23mm by 27mm large, and is believed to be fabricated using TSMC's 28nm HKMG process.

The HBM uses through silicon vias (TSVs) to connect the DRAM dies and base logic die together, and this is a fairly new technology for DRAM. Samsung has a 20nm DDR4 with four stacked DRAM dies with TSVs, but this part is not a wide I/O device, nor does it contain a base logic die. Hynix's HBM has a 1,024-wide bus qualifying it as wide I/O. It employs a base logic die as an interface between the four DRAM die stack and an interposer that supports both the HBM modules and the AMD GPU. The HBM can be considered 3D packaging, while the laterally spaced apart layout for the GPU and HBM modules on the interposer makes for a 2.5D package.

Figure 1: AMD Fiji GPU with Hynix HBM memories (Source: : Detailed Structural Analysis of the SK-Hynix HBM, TechInsights)

Figure 2 is a SEM cross section of the Hynix HBM module showing the four DRAM dies, the base logic die, the AMD interposer and the laminate substrate. The bottom three DRAM dies have been thinned, while the top DRAM die is considerably thicker. The thicker top DRAM die is likely a deliberate design feature, and is possibly being used to add mechanical stiffness to the HBM module. Microbump structures connecting the dies together and to the interposer are just visible in this image.

Figure 2: Hynix HBM memory (Source: Package Analysis of the SK-Hynix HBM, TechInsights)

The TSVs used to connect the stacked DRAM dies together can be seen in figures 3 and 4. A via middle process is used to form the TSVs, where the wafers have undergone their front end of line processing (FEOL) to make the transistors, their contacts and pre-metal dielectrics. A reactive ion etch was likely used to make the TSV openings. The vias have a slight taper, with the top portions of the vias, nearest the active circuitry, being slightly wider than the bottom portions.

Figure 3: Stacked DRAM Dies and TSVs (Source: Package Analysis of the SK-Hynix HBM, TechInsights)

The bottom portion of the TSV (figure 4) is seen contacting the copper microbump, while the top portion of the via contacts a copper interconnect in the DRAM die.

The topmost DRAM die seen in figure 2 also contains TSVs and these are seen in the bottom DRAM die in figure 4. Figure 4 has been inverted so as to place the active circuitry on top. The bottom die has vias that penetrate approximately 50?m into the silicon substrate indicating that the via etch was performed from the topside of the die. The tops of the TSVs lie beneath the die's bond pads, which tells us that the via openings were made before the back end of line (BEOL) processing.

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