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Edwards introduces green, cost-efficient vacuum pumps

Posted: 17 Mar 2016 ?? ?Print Version ?Bookmark and Share

Keywords:Vacuum pumps? semiconductor? flat panel manufacturing? CVD? PVD?

Edwards, manufacturer of integrated vacuum and abatement solutions, has introduced two new vacuum pump product families: the iXM Series for semiconductor etch and chemical vapour deposition (CVD) applications, and the iXL900R for fast pump down of large flat panel display (FPD) loadlock chambers.

The new product families help reduce the environmental impact of manufacturing operations, while also helping reduce costs.

The new iXM Series of dry pumps reduces environmental impact and customer costs for etch and CVD processes, allowing them to run their latest processes with low energy consumption and ambient noise level.


The pumps are designed to deliver increased lifetime when used for highly corrosive etch processes. They also offer a significantly lower footprint compared to other pumps on the market.

The iXL900R is a fast loadlock pump for FPD loadlock applications. This new pump is particularly well suited to the largest loadlock chambers used for plasma vapour deposition (PVD) applications. Users will need fewer pumps per loadlock chamber, which reduces installation time, systemisation costs, maintenance and utilities consumption.

The latest vacuum pumps offer improvements in overall energy efficiency and savings from a unique idle mode that reduces energy usage when full power is not required.

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