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2016-02-01 Preventing common MEMS failure mechanisms
The first step in ensuring MEMS reliability is to avoid common pitfalls during the design and process development phase to assure a stronger and more reliable part-upon-marketplace introduction.
2013-06-27 SPTS purchases Xactix to expand etch sol'ns
SPTS now supports release technologies for silicon/molybdenum/germanium and silicon oxide sacrificial layers that eliminate "stiction" among moving parts that can disable precision MEMS devices.
2005-02-11 MEMs RF front-end filters needed
The microelectromechanical systems industry has huge opportunities in the market for radio frequency front-end filters, panelists said here during the International Solid-State Circuits Conference.
2007-08-16 MEMS pioneer draws up technology's course
MEMS pioneer Kurt Petersen of SiTime shares MEMS' development since the 1980s as well as his thoughts on where it is headed in the future.
2015-05-04 MEMS looks for its Moore's Law
MEMS provide an alternative route to scaling technology beyond Moore's Law that could have advantages in markets such as the Internet of Things.
2014-05-29 A primer on BAW gyroscopes for inertial sensing
Here is a look at bulk acoustic wave gyroscopes and how a company's MEMS manufacturing process can be utilised to produce inertial sensors these days.
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