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2007-02-01 WaferSense ATS helps eliminate wafer scrap
CyberOptics claim its WaferSense ATS employs machine vision to see inside semiconductor equipment and to help avoid costly wafer mishandling, a significant cause of wafer scrap in highly automated semiconductor manufacturing plants.
2013-12-20 CyberOptics expands WaferSense line with 450nm devices
WaferSense products are wireless, wafer-shaped, real-time measurement devices that travel through fabrication tools similar to actual wafers.
2004-11-10 Wafer processing device provides quick, accurate leveling
CyberOptics announced a wireless, wafer-like device that enables quick and accurate leveling of semiconductor wafer processing and automation equipment.
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