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| 2007-02-01 | WaferSense ATS helps eliminate wafer scrap CyberOptics claim its WaferSense ATS employs machine vision to see inside semiconductor equipment and to help avoid costly wafer mishandling, a significant cause of wafer scrap in highly automated semiconductor manufacturing plants. |
| 2013-12-20 | CyberOptics expands WaferSense line with 450nm devices WaferSense products are wireless, wafer-shaped, real-time measurement devices that travel through fabrication tools similar to actual wafers. |
| 2004-11-10 | Wafer processing device provides quick, accurate leveling CyberOptics announced a wireless, wafer-like device that enables quick and accurate leveling of semiconductor wafer processing and automation equipment. |
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