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2005-05-27 U.K. etch equipment company opens Singapore office
Surface Technology Systems plc, a supplier of plasma etching equipment for silicon and MEMS applications, has opened an office in Singapore.
2002-12-11 Tegal, STMicroelectronics co-develop etch process
Tegal Corp. has completed the first phase of a joint development project with IC manufacturer STMicroelectronics.
2003-02-12 Tegal receives two patents for new etch methods
Tegal Corp. has obtained U.S. Patents Nos. 6,492,280 and 6,500,314 for producing sub-0.155m devices via a unique apparatus and solid source method.
2002-04-04 Tegal gets etch system order from auto electronics supplier
Tegal Corp. has received an order for a Tegal 901e diode plasma etch system from an undisclosed supplier of automotive electronics devices.
2002-07-24 Tegal develops plasma etch process for FeRAM materials
Tegal Corp. has developed plasma etch processes for ferroelectric RAM (FeRAM) materials by implementing patented technologies for the closed-loop control and monitoring of wafer temperatures during etching.
2002-04-10 Tegal develops next-generation plasma etch process
Tegal Corp. has developed a next-generation plasma etch process for high throughput GaAs via hole etch.
2013-06-27 SPTS purchases Xactix to expand etch sol'ns
SPTS now supports release technologies for silicon/molybdenum/germanium and silicon oxide sacrificial layers that eliminate "stiction" among moving parts that can disable precision MEMS devices.
2010-10-25 Mattson ships paradigmE etch system to logic fab
Mattson Technology says paradigmE now established in foundry, memory and logic fabs
2001-10-11 Low open area (2 percent) oxide-etch endpoint using the CETAC EP-2000
This application note discusses the use of the CETAC EP-2000 Endpoint and Plasma Diagnostic System to solve the sensitivity issues for low open area plasma etch endpoint applications.
2007-09-13 Firms collaborate on etch process for nanoimprint litho
Nanoimprint lithography stamp provider NIL Technology A/S and Oxford Instruments have partnered to develop etch processes targeted at nanoimprint lithography.
2001-10-11 Determining photomask etch endpoint with the CETAC EP-2000
This application note discusses the use of the CETAC EP-2000-4 Plasma Diagnostic and Endpoint System to determine endpoint for almost all photomask etches.
2014-07-08 Deposition, etch equipment revs up 3D NAND ramp-up
The equipment from Lam Research addresses the need for three of the most critical steps in forming 3D NAND memory cells: stack deposition, vertical channel etching, and tungsten wordline deposition.
2001-10-05 Capacitance manometer retrofit kits for AMAT 8100/8300 etch systems
This application note describes heated manometer models as suitable replacements for the original problem-vulnerable MKS Type 370 Baratron sensor.
2009-03-06 Bosch taps Lam's deep silicon etch system
Robert Bosch GmbH has selected Lam Research Corp.'s TCP 9400DSiE deep silicon etch system for current and next-generation manufacturing.
2003-03-11 Bookham introduces latest etch process
Bookham Technology plc has developed an in-situ etch and regrowth process for uncooled InP buried-heterostructure lasers that is said to result in 50 percent lower rates of burn-in degradation than can be obtained by current standard processes.
2002-11-28 ASI acquires Lam Research plasma etch line
Aspect Systems Inc., a wholly owned subsidiary of DND Technologies, has purchased the entire etch line of of Lam Research Corp.
2003-07-31 TEL secures multiple orders from Therma-Wave
Tokyo Electron Ltd, a supplier of semiconductor and FPD production equipment in Japan, has placed multiple follow-on orders to Therma-Wave Inc.
2002-12-27 Tegal to install "proteomics" analysis system in Zyomyx fab
Zyomyx Inc. has purchased a 903e plasma etch system from Tegal Corp.
2002-08-19 Tegal to acquire sputtering equipment company
Tegal Corp. has signed a definitive agreement to acquire privately held Sputtered Films Inc.
2003-11-13 Tegal to acquire assets of Simplus Systems
Tegal Corp. has signed a definitive agreement to purchase the assets of Simplus Systems Corp.
2003-12-17 Tegal purchases assets of Simplus Systems
Tegal Corp., a designer and manufacturer of plasma etch and deposition systems used in the production of ICs, has completed the purchase of the assets of Simplus Systems Corp.
2004-12-30 Tegal moves European headquarters to Dresden
Tegal Corp. has moved its European headquarters to Thiendorf, near Dresden, from Munich, Germany.
2005-05-16 Superconductors set course for wireless
Technological maturity and potentially lucrative applications suggest that low-temperature superconducting is turning a corner.
2003-07-17 Nova tool suits CD, profile measurements
Nova Measuring Instruments Ltd has introduced its NovaScan CD, an integrated tool used for critical dimensions and profile measurements.
2010-09-29 New photomask etcher tackles 22nm barrier
Applied Materials delivers solution for accurate photomasks at 22nm
2002-12-12 Microchip selects Applied Materials for service support
Applied Materials Inc. has announced a multi-year Total Support Package contract with Microchip Technology Inc.
2011-12-19 Lam buys rival Novellus
Lam Research has agreed to pay $3.3 billion for its rival, semiconductor capital equipment maker Novellus.
2002-03-19 KLA-Tencor enhances lithography simulation software
The company announced the addition of an etch modeling and analysis module to its PROLITH lithography simulation and modeling software to provide better awareness and control of the impact of lithographic changes on the quality of IC patterns etched into the semiconductor wafer.
2003-01-28 Hitachi subsidiary joins SiLKnet Alliance
Hitachi High-Technologies Corp. has joined the SiLKnet Alliance data network to develop etch processes that are compatible with SiLK and porous SiLK semiconductor dielectric resins.
2002-07-19 FSI yields high-k silicate processes
FSI Int. Inc., with the cooperation of the International SEMATECH (ISMT), has developed an enabling process for the implementation of high-k silicate gates for the 65nm technology node.
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