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2003-02-11 Exitech to use Brooks-PRI handling systems
Exitech Ltd has purchased two of Brooks-PRI Automation Inc.'s Gemini Express 5000 vacuum handling systems, including supervisory level software for controlling the systems.
2004-08-05 Intel unveils EUV micro-exposure tool
Intel Corp. has installed an extreme ultraviolet (EUV) micro-exposure tool (MET) from Exitech Ltd at its development fab in Sta. Clara, California.
2008-02-06 Will EUV litho ever cross over from R&D to production?
The procurement of an R&D EUV lithography tool from Nikon has reportedly been put off by Intel, raising more questions about the viability of EUV for mass chip production.
2003-02-19 EUV activity shifts to Sematech North
Developers of EUV lithography are looking north, specifically to the University at Albany, State University of New York, for their future.
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