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2005-09-09 MKS rolls out new manometer
MKS Instruments introduced its 600C eBaratron capacitance manometer, designed for networking with Ethernet communications devices for real-time diagnostics
2001-10-05 Controlling the pump down: Precise control with Baratron capacitance manometer technology
This application note describes the use of the MKS Type 51 Baratron capacitance-based pressure switch to control the pump down and reduce potential product contamination.
2001-10-05 Capacitance manometer retrofit kits for AMAT 8100/8300 etch systems
This application note describes heated manometer models as suitable replacements for the original problem-vulnerable MKS Type 370 Baratron sensor.
2001-10-05 Accurately controlling the load lock vent cycle using Baratron capacitance manometer technology
This application note presents a solution on how to control load lock venting with the use of MKS Type 41 atmospheric switch.
2001-10-05 Effect of condensable effluent process contamination on capacitance manometers
This application note presents a solution on how to resolve the effects of ambient temperature changes in capacitance manometers.
2005-09-20 New solution for pressure measurement in semiconductor apps
MKS Instruments introduced a compact and low current solution for pressure measurement in difficult semiconductor and biopharmaceutical apps where condensable by-products exist.
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