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2003-08-11 Wafer inspection system allows rapid testing
Nikon's SITECH group has introduced the AMI-3000 wafer inspection system that is designed to meet 300mm wafer production in the 90nm node and beyond.
2003-08-19 Optical inspection system has additional load ports
Nikon's Semiconductor Inspection Technologies Group (SITECH) has introduced the Optistation 3200 semiconductor inspection system.
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