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| 2003-08-11 | Wafer inspection system allows rapid testing Nikon's SITECH group has introduced the AMI-3000 wafer inspection system that is designed to meet 300mm wafer production in the 90nm node and beyond. |
| 2003-08-19 | Optical inspection system has additional load ports Nikon's Semiconductor Inspection Technologies Group (SITECH) has introduced the Optistation 3200 semiconductor inspection system. |
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